TY  - BOOK
AU  - Postek, Michael, ed.
TI  - Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
T2  - Proceedings of SPIE; V. 9173
SN  - 9781628412000 (Print)
PY  - 2014///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9173
ER  -