00561nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245011000117260003200227300002000259490003300279856010300312IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628412000 (Print)  cIIA Library  aPostek, Michael, ed. 0aInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIIIh[eBook]  aWashington, USAbSPIEc2014  aOnline resource  aProceedings of SPIE; V. 9173  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9173yClick Here to Access eBook