Postek, Michael, ed. <br/><br/>
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII  [eBook] 

 - Washington, USA  SPIE  2014 
 - Online resource 
 - Proceedings of SPIE; V. 9173 .
<br/><br/><label>ISBN: </label>9781628412000 (Print)