00790nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245010900124260003200233300002000265490003300285856010300318942000700421999001700428952016300445IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819496690 (Print)  cIIA Library  aPostek, Michael, ed.944312 0aInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIIh[eBook]  aWashington, USAbSPIEc2013  aOnline resource  aProceedings of SPIE; V. 8819  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8819yClick Here to Access eBook  cEB  c26625d26625  00104070aBANbBANd2011-07-01eSPIEhV. 8819l0pEB6085r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8819w2021-11-05yEB