00560nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245010900117260003200226300002000258490003300278856010300311IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819496690 (Print)  cIIA Library  aPostek, Michael, ed. 0aInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIIh[eBook]  aWashington, USAbSPIEc2013  aOnline resource  aProceedings of SPIE; V. 8819  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8819yClick Here to Access eBook