Postek, Michael, ed. <br/><br/>
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII  [eBook] 

 - Washington, USA  SPIE  2013 
 - Online resource 
 - Proceedings of SPIE; V. 8819 .
<br/><br/><label>ISBN: </label>9780819496690 (Print)