00559nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245010800117260003200225300002000257490003300277856010300310IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819491831 (Print)  cIIA Library  aPostek, Michael, ed. 0aInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIh[eBook]  aWashington, USAbSPIEc2012  aOnline resource  aProceedings of SPIE; V. 8466  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8466yClick Here to Access eBook