TY  - BOOK
AU  - Postek, Michael, ed.
TI  - Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
T2  - Proceedings of SPIE; V. 8105
SN  - 9780819487155 (Print)
PY  - 2011///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8105
ER  -