00558nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245010700117260003200224300002000256490003300276856010300309IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819487155 (Print)  cIIA Library  aPostek, Michael, ed. 0aInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors Vh[eBook]  aWashington, USAbSPIEc2011  aOnline resource  aProceedings of SPIE; V. 8105  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8105yClick Here to Access eBook