@book{26622,
	author = {Postek, Michael, ed.},
	title = {Instrumentation, Metrology, and Standards for Nanomanufacturing IV},
	publisher = {SPIE},
	year = {2010},
	series = {Proceedings of SPIE; V. 7767},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7767}
}