00762nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245008100124260003200205300002000237490003300257856010300290942000700393999001700400952016300417IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819476951 (Print)  cIIA Library  aPostek, Michael, ed.944308 0aInstrumentation, Metrology, and Standards for Nanomanufacturing IIIh[eBook]  aWashington, USAbSPIEc2009  aOnline resource  aProceedings of SPIE; V. 7405  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7405yClick Here to Access eBook  cEB  c26621d26621  00104070aBANbBANd2011-07-01eSPIEhV. 7405l0pEB6081r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7405w2021-11-05yEB