00532nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245008100117260003200198300002000230490003300250856010300283IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819476951 (Print)  cIIA Library  aPostek, Michael, ed. 0aInstrumentation, Metrology, and Standards for Nanomanufacturing IIIh[eBook]  aWashington, USAbSPIEc2009  aOnline resource  aProceedings of SPIE; V. 7405  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7405yClick Here to Access eBook