00761nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245008000124260003200204300002000236490003300256856010300289942000700392999001700399952016300416IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819472625 (Print)  cIIA Library  aPostek, Michael, ed.944307 0aInstrumentation, Metrology, and Standards for Nanomanufacturing IIh[eBook]  aWashington, USAbSPIEc2008  aOnline resource  aProceedings of SPIE; V. 7042  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7042yClick Here to Access eBook  cEB  c26620d26620  00104070aBANbBANd2011-07-01eSPIEhV. 7042l0pEB6080r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7042w2021-11-05yEB