@book{26620,
	author = {Postek, Michael, ed.},
	title = {Instrumentation, Metrology, and Standards for Nanomanufacturing II},
	publisher = {SPIE},
	year = {2008},
	series = {Proceedings of SPIE; V. 7042},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7042}
}