00758nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245007700124260003200201300002000233490003300253856010300286942000700389999001700396952016300413IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819467966 (Print)  cIIA Library  aPostek, Michael, ed.944306 0aInstrumentation, Metrology, and Standards for Nanomanufacturingh[eBook]  aWashington, USAbSPIEc2007  aOnline resource  aProceedings of SPIE; V. 6648  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6648yClick Here to Access eBook  cEB  c26619d26619  00104070aBANbBANd2011-07-01eSPIEhV. 6648l0pEB6079r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6648w2021-11-05yEB