00748nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003400092245006600126260003200192300002000224490003300244856010300277942000700380999001700387952016200404IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892528370 (Print)  cIIA Library  aLangenbeck, Peter, ed.944295 0aIn-Process Optical Metrology for Precision Machiningh[eBook]  aWashington, USAbSPIEc1987  aOnline resource  aProceedings of SPIE; V. 0802  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0802yClick Here to Access eBook  cEB  c26599d26599  00104070aBANbBANd2011-07-01eSPIEhV. 802l0pEB6059r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0802w2021-11-05yEB