TY - BOOK AU - Langenbeck, Peter, ed. TI - In-Process Optical Metrology for Precision Machining T2 - Proceedings of SPIE; V. 0802 SN - 9780892528370 (Print) PY - 1987/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0802 ER -