TY  - BOOK
AU  - Ajuria, Sergio, ed.
TI  - In-Line Methods and Monitors for Process and Yield Improvement
T2  - Proceedings of SPIE; V. 3884
SN  - 9780819434814 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3884
ER  -