@book{26584,
	author = {Ajuria, Sergio, ed.},
	title = {In-Line Methods and Monitors for Process and Yield Improvement},
	publisher = {SPIE},
	year = {1999},
	series = {Proceedings of SPIE; V. 3884},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3884}
}