TY  - BOOK
AU  - Kissinger, Gudrun, ed.
TI  - In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing II
T2  - Proceedings of SPIE; V. 4406
SN  - 9780819441072 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4406
ER  -