@book{26583,
	author = {Kissinger, Gudrun, ed.},
	title = {In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing II},
	publisher = {SPIE},
	year = {2001},
	series = {Proceedings of SPIE; V. 4406},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4406}
}