00566nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002800092245011200120260003200232300002000264490003300284856010300317IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819432230 (Print)  cIIA Library  aAmberiadis, Kostas, ed. 0aIn-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturingh[eBook]  aWashington, USAbSPIEc1999  aOnline resource  aProceedings of SPIE; V. 3743  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3743yClick Here to Access eBook