Amberiadis, Kostas, ed. <br/><br/>
In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing  [eBook] 

 - Washington, USA  SPIE  1999 
 - Online resource 
 - Proceedings of SPIE; V. 3743 .
<br/><br/><label>ISBN: </label>9780819432230 (Print)