00573nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245012300116260003200239300002000271490003300291856010300324IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819429681 (Print)  cIIA Library  aAjuria, Sergio, ed. 0aIn-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing IIh[eBook]  aWashington, USAbSPIEc1998  aOnline resource  aProceedings of SPIE; V. 3509  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3509yClick Here to Access eBook