@book{26581,
	author = {Ajuria, Sergio, ed.},
	title = {In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II},
	publisher = {SPIE},
	year = {1998},
	series = {Proceedings of SPIE; V. 3509},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3509}
}