TY  - BOOK
AU  - DeBusk, Damon, ed.
TI  - In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing
T2  - Proceedings of SPIE; V. 3215
SN  - 9780819426475 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3215
ER  -