00569nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245012000115260003200235300002000267490003300287856010300320IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819426475 (Print)  cIIA Library  aDeBusk, Damon, ed. 0aIn-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturingh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  aProceedings of SPIE; V. 3215  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3215yClick Here to Access eBook