DeBusk, Damon, ed. <br/><br/>
In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing  [eBook] 

 - Washington, USA  SPIE  1997 
 - Online resource 
 - Proceedings of SPIE; V. 3215 .
<br/><br/><label>ISBN: </label>9780819426475 (Print)