@book{26580,
	author = {DeBusk, Damon, ed.},
	title = {In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing},
	publisher = {SPIE},
	year = {1997},
	series = {Proceedings of SPIE; V. 3215},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3215}
}