00732nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003900092245004500131260003200176300002000208490003300228856010300261942000700364999001700371952016200388IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892527816 (Print)  cIIA Library  aPryputniewicz, Ryszard, ed.944138 0aIndustrial Laser Interferometryh[eBook]  aWashington, USAbSPIEc1987  aOnline resource  aProceedings of SPIE; V. 0746  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0746yClick Here to Access eBook  cEB  c26378d26378  00104070aBANbBANd2011-07-01eSPIEhV. 746l0pEB5838r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0746w2021-11-05yEB