TY  - BOOK
AU  - Pustovoy, Vladimir, ed.
TI  - Indo-Russian Workshop on Micromechanical Systems
T2  - Proceedings of SPIE; V. 3903
SN  - 9780819435132 (Print)
PY  - 1999///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3903
ER  -