00516nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002800092245006200120260003200182300002000214490003300234856010300267IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819435132 (Print)  cIIA Library  aPustovoy, Vladimir, ed. 0aIndo-Russian Workshop on Micromechanical Systemsh[eBook]  aWashington, USAbSPIEc1999  aOnline resource  aProceedings of SPIE; V. 3903  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3903yClick Here to Access eBook