@book{26351,
	author = {Pustovoy, Vladimir, ed.},
	title = {Indo-Russian Workshop on Micromechanical Systems},
	publisher = {SPIE},
	year = {1999},
	series = {Proceedings of SPIE; V. 3903},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3903}
}