TY - BOOK AU - Svetkoff, Donald, ed. TI - Imaging and Illumination for Metrology and Inspection T2 - Proceedings of SPIE; V. 2348 SN - 9780819416834 (Print) PY - 1994/// CY - Washington, USA PB - SPIE UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2348 ER -