TY  - BOOK
AU  - Esashi, Masayoshi, ed.
TI  - ICO20: MEMS, MOEMS, and NEMS
T2  - Proceedings of SPIE; V. 6032
SN  - 9780819460639 (Print)
PY  - 2006///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6032
ER  -