Esashi, Masayoshi, ed. <br/><br/>
ICO20: MEMS, MOEMS, and NEMS  [eBook] 

 - Washington, USA  SPIE  2006 
 - Online resource 
 - Proceedings of SPIE; V. 6032 .
<br/><br/><label>ISBN: </label>9780819460639 (Print)