@book{26099,
	author = {Esashi, Masayoshi, ed.},
	title = {ICO20: MEMS, MOEMS, and NEMS},
	publisher = {SPIE},
	year = {2006},
	series = {Proceedings of SPIE; V. 6032},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6032}
}