00745nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003100092245006500123260003200188300002000220490003300240856010300273942000700376999001700383952016300400IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819469595 (Print)  cIIA Library  aSasaki, Minoru, ed.943942 0aICMIT 2007: Mechatronics, MEMS, and Smart Materialsh[eBook]  aWashington, USAbSPIEc2007  aOnline resource  aProceedings of SPIE; V. 6794  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6794yClick Here to Access eBook  cEB  c26092d26092  00104070aBANbBANd2011-07-01eSPIEhV. 6794l0pEB5552r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6794w2021-11-05yEB