00515nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245006500116260003200181300002000213490003300233856010300266IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819469595 (Print)  cIIA Library  aSasaki, Minoru, ed. 0aICMIT 2007: Mechatronics, MEMS, and Smart Materialsh[eBook]  aWashington, USAbSPIEc2007  aOnline resource  aProceedings of SPIE; V. 6794  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6794yClick Here to Access eBook