TY  - BOOK
AU  - Monahan, Kevin, ed.
TI  - Handbook of Critical Dimension Metrology and Process Control: A Critical Review
T2  - Proceedings of SPIE; V. 10274
SN  - 9781510610323 (Online)
PY  - 1994///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10274
ER  -