00546nam a2200145Ia 4500003000900000008004100009020002700050040001600077100002400093245009300117260003200210300002000242490003400262856010400296IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510610323 (Online)  cIIA Library  aMonahan, Kevin, ed. 0aHandbook of Critical Dimension Metrology and Process Control: A Critical Reviewh[eBook]  aWashington, USAbSPIEc1994  aOnline resource  aProceedings of SPIE; V. 10274  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10274yClick Here to Access eBook