@book{25735,
	author = {Monahan, Kevin, ed.},
	title = {Handbook of Critical Dimension Metrology and Process Control: A Critical Review},
	publisher = {SPIE},
	year = {1994},
	series = {Proceedings of SPIE; V. 10274},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10274}
}