00410nam a2200157Ia 4500003000900000008004100009040001600050080001500066100002000081245004900101260003200150300001500182650001900197650001700216650001900233IN-BaIIA211028s9999    xx            000 0 eng d  cIIA Library  a533.5bVAN  aVan Atta, C. M. 0aVacuum science and engineeringcC M van Atta  aNew YorkbMcGraw-Hillc1965  axiv, 459p.  aNASA Thesaurus  aVacuum gases  aVacuum systems