TY  - BOOK
AU  - Veiko, Vadim, ed.
TI  - Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013
T2  - Proceedings of SPIE; V. 9065
SN  - 9780819499929 (Print)
PY  - 2013///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9065
ER  -