00525nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245007700114260003200191300002000223490003300243856010300276IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819499929 (Print)  cIIA Library  aVeiko, Vadim, ed. 0aFundamentals of Laser-Assisted Micro- and Nanotechnologies 2013h[eBook]  aWashington, USAbSPIEc2013  aOnline resource  aProceedings of SPIE; V. 9065  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9065yClick Here to Access eBook