Veiko, Vadim, ed. <br/><br/>
Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013  [eBook] 

 - Washington, USA  SPIE  2013 
 - Online resource 
 - Proceedings of SPIE; V. 9065 .
<br/><br/><label>ISBN: </label>9780819499929 (Print)