@book{25593,
	author = {Veiko, Vadim, ed.},
	title = {Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2013},
	publisher = {SPIE},
	year = {2013},
	series = {Proceedings of SPIE; V. 9065},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9065}
}