TY  - BOOK
AU  - Veiko, Vadim, ed.
TI  - Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010
T2  - Proceedings of SPIE; V. 7996
SN  - 9780819485694 (Print)
PY  - 2011///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7996
ER  -