Veiko, Vadim, ed. <br/><br/>
Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010  [eBook] 

 - Washington, USA  SPIE  2011 
 - Online resource 
 - Proceedings of SPIE; V. 7996 .
<br/><br/><label>ISBN: </label>9780819485694 (Print)