TY  - BOOK
AU  - Veiko, Vadim, ed.
TI  - Fundamentals of Laser Assisted Micro- and Nanotechnologies
T2  - Proceedings of SPIE; V. 6985
SN  - 9780819471833 (Print)
PY  - 2008///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6985
ER  -